微纳米加工技术及其应用(英文版)(精)
内容提要 ：
本书集作者多年来的实践经验与研究
前言：
In the summer of 1994, I went back to China to attend the Chinese Young Scholars Forum on Applications of Optical Technologies for Microfabrication. This was the first time I returned to China since I came to the UK in 1989 to work as a postdoctoral researcher at the Microelectronic Research Centre, Cambridge University, and subsequently at the Central Microstructure Facility, Rutherford Appleton Laboratory. China was still considered back then to be far lagging behind in mainstream modem high technologies. I presented my work on optical lit..
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